ELI Beamlines has already been equipped with laser beam distribution devices or vacuum chambers for laser compressors, for example, by STREICHER in the past. The new vacuum chamber ELIAS is designed for deposition of thin multilayers on large optical elements of ultra-intense lasers.
The project was developed in collaboration with ELI Beamlines, as well as with the American company Vacuum Innovations, which is the supplier of the main part of the technology.
The chamber is made of stainless steel, has a total weight of 12 tons, internal dimensions are approximately 2.5 x 2.5 x 2.4 m (height), volume is approximately 15 m³. Inside there is a protective shield made of stainless steel plates that protects the walls of the chamber during the coating process. Thanks to a cooling channel welded on the outer surface of the entire chamber, a stable temperature will be maintained inside.
Final assembly and cleaning were carried out in an ISO6 cleanroom according to EN ISO 14644-1.
The ELIAS vacuum chamber shows that, even for large-scale equipment, the highest cleanliness requirements can be met, such as those required for the semiconductor or optical industry.